Description
hamamatsu Si photodiode S8552 Vacuum UV (VUV) monitoring photodiodes
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hamamatsu Si photodiode S8552 Vacuum UV (VUV) monitoring photodiodes
S8552 have sensitivity in the vacuum UV region. It is specially suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region provides improved stability in sensitivity for VUV light irradiation compared to previous products.
Features
– Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm)
– Large photosensitive area: 10 × 10 mm
– Windowless package: 16.5 × 15.0 mm ceramic package








